Micromachining of Pyrex7740 Glass for Micro-fluidic Devices
نویسنده
چکیده
This paper presents a new wafer-level micromold processing technology of Pyrex7740 glass for micro-fluidic devices, which is based on viscous deformation at temperatures above glass softening point temperature, and it is also described as a thermoforming process. The fabrication of microchannels on Pyrex7740glass wafer with high aspect ratio has come true. It could also retain the original surface roughness of the glass wafer for an excellent fluid flow property. In this study, the array of microchannels on the Pyrex7740 glass wafer with 10μm feature size wide is accurately fabricated. The optimized processing parameters are obtained after a series of experiments.
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